A permanent magnetic mask chuck is described herein. The permanent magnetic mask chuck includes a body with a plurality of permanent magnets positioned therein. The permanent magnets can then deliver a magnetic force to a mask to position and hold the mask over or on the substrate for further deposition.
Substrate Carrier With Integrated Electrostatic Chuck
A substrate carrier adapted to use in a processing system includes an electrode assembly and a support base. The electrode assembly is configured to generate an electrostatic chucking force for securing a substrate to the substrate carrier. The support base has a heating/cooling reservoir formed therein. The electrode assembly and the support base form an unitary body configured for transport within a processing system. A quick disconnect is coupled to the body and configured to trap a heat regulating medium in the reservoir heating/cooling reservoir when the body is decoupled from a source of heat regulating medium.
Substrate Carrier With Integrated Electrostatic Chuck
A substrate carrier adapted to use in a processing system includes an electrode assembly and a support base. The electrode assembly is configured to generate an electrostatic chucking force for securing a substrate to the substrate carrier. The support base has a heating/cooling reservoir formed therein. The electrode assembly and the support base form an unitary body configured for transport within a processing system. A quick disconnect is coupled to the body and configured to trap a heat regulating medium in the reservoir heating/cooling reservoir when the body is decoupled from a source of heat regulating medium.
An electromagnetic mask chuck is described herein. The electromagnetic mask chuck includes a body with a plurality of electromagnets formed therein. The electromagnets can then deliver a magnetic force to a mask to position and hold the mask over or on the substrate for further deposition. The electromagnets are controlled using a power source, to deliver a controlled magnetic field to the mask.
A permanent magnetic mask chuck is described herein. The permanent magnetic mask chuck includes a body with a plurality of permanent magnets positioned therein. The permanent magnets can then deliver a magnetic force to a mask to position and hold the mask over or on the substrate for further deposition.
Jun 2013 to 2000 R&D Mechanical EngineerUniversity of California Berkeley, CA Aug 2008 to May 2013 Graduate Student ResearcherUniversity of California and Lawrence Berkeley National Lab Berkeley, CA Sep 2008 to Aug 2010 Graduate Student ResearcherGeneral Motors
Jun 2007 to Jul 2007 Research Intern
Education:
UC Berkeley 2008 to 2013 Ph.D. in Mechanical Engineering (Minors: Electrical Engineering and Materials)University of California Santa Barbara, CA 2012 to 2012 Certificate in Summer School for Inorganic Materials for Energy Conversion and StorageHaas School of Business, UC Berkeley 2009 to 2012 CertificateUC Berkeley 2008 to 2010 Master of Science in Mechanical EngineeringJilin University 2004 to 2008 Bachelor of Engineering in Automotive Engineering
Skills:
*Electrochemical Characterization: EIS, CV, Galvanic Charging/Discharging Techniques, Temperature and Humidity Environmental Test, Encapsulations Permeability Test *Materials Physical Characterization: Microscopies (SEM, OM, AFM), Profilometries, Tensiometry, XRD, DSC, Van Der Pauw Method, Thermal Conductivity Measurement *Materials Rheological and Mechanical Properties Test and Analysis *MEMS and IC Device Design: Clean Room Experience in Microfabrication Technologies *CAD Modeling: AutoCAD, SolidWorks, CATIA, NX Unigraphics *Finite Element Analysis and Programming: COMSOL Multiphysics, ADAMS, MATLAB, C *Languages: English (Fluent), Mandarin (Native), Japanese (Basic)