Wayne M Belgarde
age ~60
from Clayton, CA
- Also known as:
-
- Wayne Martin Belgarde
- Wayne Darcy Belgarde
- Wayne I Belgarde
- Wayne Belgrade
- Wayne Belgard
- Phone and address:
-
707 Condor Pl, Clayton, CA 94517
9256730768
Wayne Belgarde Phones & Addresses
- 707 Condor Pl, Clayton, CA 94517 • 9256730768 • 9256730788
- Walnut Creek, CA
- Pleasant Hill, CA
Work
-
Company:FerrotecNov 2010
-
Position:Mechanical engineer
Industries
Renewables & Environment
Us Patents
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Dual Gate Isolating Maintenance Slit Valve Chamber With Pumping Option
view source -
US Patent:20060278164, Dec 14, 2006
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Filed:Jun 10, 2005
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Appl. No.:11/150360
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Inventors:Philip Petrach - Napa CA, US
Wayne Belgarde - Clayton CA, US
Michael Strahlendorf - Oakley CA, US -
International Classification:C23C 16/00
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US Classification:118719000
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Abstract:In a coater for applying layers on large substrates, isolation between portions of the coater is provided by dual gate slit valve chambers. A dual gate slit valve has one gate on either side of a wall that has an opening. Gates are clear of the opening in the open position and cover the opening from both sides in the closed position. When one side of the dual gate slit valve chamber is at atmospheric pressure and the other is under vacuum, atmospheric pressure helps to keep the slit valve sealed by pushing one gate against the wall. This works regardless of which side of the valve is at atmosphere. One or more pumps may be mounted on the slit valve chamber.
Resumes
Mechanical Engineer
view sourceLocation:
707 Condor Pl, Clayton, CA 94517
Industry:
Renewables & Environment
Work:
Ferrotec
Mechanical Engineer
Mechanical Engineer
Mylife
Wayne Belgarde Clayt CA
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