Todd J. Brill - Round Rock TX, US Michael Teferra - Los Gatos CA, US Amitabh Puri - San Jose CA, US Daniel R. Jessop - Eagle Mountain UT, US Glade L. Warner - Sandy UT, US David C. Duffin - Sandy UT, US
Assignee:
Applied Materials, Inc. - Santa Clara CA
International Classification:
B65G 47/46
US Classification:
198358, 198349, 1983496
Abstract:
In a first aspect, a first method is provided for electronic device manufacturing. The first method includes the steps of (1) receiving a request to transfer a carrier from a first substrate loading station to a second substrate loading station of an electronic device manufacturing facility including a plurality of substrate loading stations, wherein the facility further includes a plurality of carrier supports coupled to a conveyor system adapted to move the carrier within the facility; (2) assigning one of the plurality of carrier supports to transfer the carrier from the first substrate loading station to the second substrate loading station such that at least one of a time required for the transfer is reduced and balance of the conveyor system is maintained; (3) moving the carrier from the first substrate loading station; and (4) moving the carrier to the second substrate loading station. Numerous other aspects are provided.
Methods And Apparatus For Transferring A Substrate Carrier Within An Electronic Device Manufacturing Facility
Todd J. Brill - Round Rock TX, US Michael Teferra - Los Gatos CA, US Amitabh Puri - San Jose CA, US Daniel R. Jessop - Eagle Mountain UT, US Glade L. Warner - Sandy UT, US David C. Duffin - Sandy UT, US
Assignee:
Applied Materials, Inc. - Santa Clara CA
International Classification:
B65G 47/10
US Classification:
198358, 198357, 1983495
Abstract:
In a first aspect, a first method is provided for electronic device manufacturing. The first method includes the steps of (1) receiving a request to transfer a carrier from a first substrate loading station to a second substrate loading station of an electronic device manufacturing facility including a plurality of substrate loading stations, wherein the facility further includes a plurality of carrier supports coupled to a conveyor system adapted to move the carrier within the facility; (2) assigning one of the plurality of carrier supports to transfer the carrier from the first substrate loading station to the second substrate loading station such that at least one of a time required for the transfer is reduced and balance of the conveyor system is maintained; (3) moving the carrier from the first substrate loading station; and (4) moving the carrier to the second substrate loading station. Numerous other aspects are provided.
Methods And Apparatus For Transferring A Substrate Carrier Within An Electronic Device Manufacturing Facility
Todd J. Brill - Round Rock TX, US Michael Teferra - Los Gatos CA, US Amitabh Puri - San Jose CA, US Daniel R. Jessop - Eagle Mountain UT, US Glade L. Warner - Sandy UT, US David C. Duffin - Sandy UT, US
Assignee:
Applied Materials, Inc. - Santa Clara CA
International Classification:
G06F 7/00 B65G 47/10
US Classification:
700230, 198358
Abstract:
In one aspect, a method is provided for electronic device manufacturing. The method includes receiving a request to transfer a carrier to or from a first substrate loading station of an electronic device manufacturing facility, and assigning one of a plurality of carrier supports to carry out the transfer based on a spacing on either side of the assigned carrier being greater than an acceptable spacing. Numerous other aspects are provided.
Methods And Apparatus For Electronic Device Manufacturing System Monitoring And Control
Todd Brill - Round Rock TX, US Michael Teferra - Los Gatos CA, US Jeffrey Hudgens - San Francisco CA, US Amitabh Puri - San Jose CA, US
International Classification:
G06F019/00
US Classification:
700112000, 700230000
Abstract:
In a first aspect, a computer program product is provided. The computer program product includes a medium readable by a computer. The computer readable medium has computer program code adapted to (1) create a band map that indicates an expected status of one or more positions along a band of a continuously moving conveyor system, each position adapted to receive a carrier support adapted to transport at least one substrate carrier around an electronic device manufacturing facility; (2) monitor status of the one or more positions included in the continuously moving conveyor system; and (3) control operation of the continuously moving conveyor system based on the status of the one or more positions. Numerous other aspects are provided.
Methods And Apparatus For Electronic Device Manufacturing System Monitoring And Control
Todd Brill - Round Rock TX, US Michael Teferra - Los Gatos CA, US Jeffrey Hudgens - San Francisco CA, US Amitabh Puri - San Jose CA, US
International Classification:
B65G 43/00 G01R 31/26 G06F 19/00
US Classification:
700110000, 198341010, 700114000, 438014000
Abstract:
In a first aspect, a computer program product is provided. The computer program product includes a medium readable by a computer. The computer readable medium has computer program code adapted to (1) create a band map that indicates an expected status of one or more positions along a band of a continuously moving conveyor system, each position adapted to receive a carrier support adapted to transport at least one substrate carrier around an electronic device manufacturing facility; (2) monitor status of the one or more positions included in the continuously moving conveyor system; and (3) control operation of the continuously moving conveyor system based on the status of the one or more positions. Numerous other aspects are provided.