Stanley Y Wu

US Patent:

8250256, Aug 21, 2012

Filed:

Jul 24, 2007

Appl. No.:

11/782412

Inventors:

Vishal V. Ghosalkar - San Jose CA, US
Che Lui Shum - San Jose CA, US
Stanley Y. Wu - San Jose CA, US

Assignee:

International Business Machines Corporation - Armonk NY

International Classification:

G06F 3/00
G06F 5/00

US Classification:

710 38, 710 18, 710 40, 710 44

Abstract:

Methods, system and computer products for user-managed multi-path performance in balanced or unbalanced fabric configurations. Exemplary embodiments include a path priority selection method, including selecting a first I/O data path to be a highest priority path in a storage area network system, selecting a second I/O data path to be a low priority path, selecting an I/O threshold value, the I/O threshold value indicating that I/O data load is excessive, directing the load balance of I/O traffic to the first I/O data path, thereby placing the second I/O data path in a standby state, monitoring the first I/O data path, determining if the first I/O data path has reached the threshold value and performing a controlled failover of the first I/O data path to the second I/O data path when an I/O data load on the first data path has reached the threshold value.

US Patent:

20060238791, Oct 26, 2006

Filed:

Apr 25, 2005

Appl. No.:

11/113940

Inventors:

Pinshan Jiang - San Jose CA, US
Hunny Kershaw - San Jose CA, US
Jamee Lee - San Jose CA, US
Stanley Wu - San Jose CA, US
Rong Zeng - San Jose CA, US

International Classification:

G06F 3/12

US Classification:

358001130

Abstract:

Provided are a method, system, and program for configuring a device using information from a device table. Device information is obtained for a device coupled to a system. The device information is provided to a device driver executing in the system. The device driver calls a method in response to determining the device driver does not support the device identified by the device information. The method provides device configuration information from a device table to the device driver. The device driver uses the device configuration information in the device table to configure the device for use in the system.

US Patent:

20200370174, Nov 26, 2020

Filed:

Mar 2, 2020

Appl. No.:

16/806656

Inventors:

- Santa Clara CA, US
Lin ZHANG - San Jose CA, US
Jiyong HUANG - Rockwall TX, US
Joseph C. WERNER - Santa Clara CA, US
Stanley WU - San Ramon CA, US
Mahesh Adinath KANAWADE - Santa Clara CA, US
Yikai CHEN - San Jose CA, US
Yixing LIN - Saratoga CA, US
Ying MA - Castro Valley CA, US

International Classification:

C23C 16/44
C01F 17/265

Abstract:

Embodiments of the present disclosure generally relate to an apparatus and a method for cleaning a processing chamber. In one embodiment, a substrate support cover includes a bulk member coated with a fluoride coating. The substrate support cover is placed on a substrate support disposed in the processing chamber during a cleaning process. The fluoride coating does not react with the cleaning species. The substrate support cover protects the substrate support from reacting with the cleaning species, leading to reduced condensation formed on chamber components, which in turn leads to reduced contamination of the substrate in subsequent processes.

US Patent:

20200071823, Mar 5, 2020

Filed:

Aug 28, 2018

Appl. No.:

16/114558

Inventors:

- Santa Clara CA, US
Yixi TIAN - Santa Clara CA, US
Shih Chang CHEN - Santa Clara CA, US
Jin SUN - Santa Clara CA, US
Rodolfo PEREZ - Santa Clara CA, US
Stanley WU - San Ramon CA, US

International Classification:

C23C 16/458
G01B 21/30

Abstract:

The present disclosure relates to a flexible support to aid in a measurement of flatness of a susceptor. The flexible support has a first support block having a substantially flat upper surface and a lower surface having a first aperture formed therein. The flexible support further has a second support block having a substantially flat lower surface and an upper surface having a second aperture formed therein. The flexible support further has a support pin configured to be receivable in the first aperture and the second aperture, the support pin configured to retain the first support block and the second support block in a spaced apart relation while allowing restricted motion of the first support block relative to the second support block via deformation of the support pin. The flexible support further has a guide disposed between the first support block and the second support block, the guide configured to allow the first support block and the second support block to move axially relative to the guide.

US Patent:

20190043744, Feb 7, 2019

Filed:

Jul 26, 2018

Appl. No.:

16/046105

Inventors:

- Santa Clara CA, US
Ali SALEHPOUR - Saratoga CA, US
Stanley WU - San Ramon CA, US
Ying MA - Castro Valley CA, US

International Classification:

H01L 21/677
H01L 21/67

Abstract:

A method and apparatus for monitoring substrate lift pin operation is disclosed and includes a support pedestal for a vacuum chamber, the support pedestal comprising a body having a plurality of openings formed between two major sides of the body, and a substrate support device disposed in each of the plurality of openings, each of the support devices comprising a housing disposed in the body, the housing having a bore formed therethrough, and a support pin disposed in the bore, wherein the body includes a monitoring device positioned proximal to the support pins of each of the substrate support devices.

US Patent:

20170191161, Jul 6, 2017

Filed:

Apr 28, 2016

Appl. No.:

15/141443

Inventors:

- Santa Clara CA, US
Hanish KUMAR - Bangalore, IN
Lin ZHANG - San Jose CA, US
Stanley WU - San Ramon CA, US

International Classification:

C23C 16/455
C23C 16/44
H01J 37/32

Abstract:

Techniques are disclosed for methods and apparatuses for reducing particle contamination formation in a high temperature processing chamber with a cooled gas feed block. The cooled gas feed has a body. The body has a main center portion having a top surface and a bottom surface. The body also has a flange extending outward from the bottom surface of the main center portion. A gas channel is disposed through the body. The gas channel has an inlet formed in the top surface of the main center portion and an outlet formed in the bottom surface of the main center portion. The body also has a center coolant channel. The center coolant channel has a first portion having an inlet formed in the top surface of the main center portion, and a second portion coupled to the first portion, the second portion having an outlet formed a sidewall of the flange.

US Patent:

20170152968, Jun 1, 2017

Filed:

Apr 6, 2016

Appl. No.:

15/110714

Inventors:

- Santa Clara CA, US
Hanish KUMAR - Bangalore, IN
Lin ZHANG - San Jose CA, US
Stanley WU - San Ramon CA, US

Assignee:

Applied Materials, Inc. - Santa Clara CA

International Classification:

F16K 41/10
H01J 37/32
F16L 11/15
H01L 21/687

Abstract:

Implementations described herein protect a chamber components from corrosive cleaning gases used at high temperatures. In one embodiment, a chamber component includes at least a bellows that includes a top mounting flange coupled to a bottom mounting flange by a tubular accordion structure. A coating is disposed on an exterior surface of at least the tubular accordion structure. The coating includes of at least one of polytetrafluoroethylene, parylene C, parylene D, diamond-like carbon (DLC), yttria stabilized zirconia, nickel, alumina, or aluminum silicon magnesium yttrium oxygen compound. In one embodiment, the chamber component is a valve having an internal bellows.