Scott W Indermuehle

US Patent:

20100224779, Sep 9, 2010

Filed:

Mar 5, 2010

Appl. No.:

12/718940

Inventors:

Scott W. Indermuehle - Danville CA, US
Charles S. Silver - Richmond CA, US
James P. Spallas - Alamo CA, US
Lawrence P. Muray - Moraga CA, US

International Classification:

H01J 37/28
G01N 23/22

US Classification:

250307, 250310

Abstract:

A scanning charged particle microscope includes a layered charged particle beam column package; a sample holder; and a layered micro-channel plate detector package located between the column package and the sample holder.

US Patent:

20150213995, Jul 30, 2015

Filed:

Jan 24, 2014

Appl. No.:

14/162802

Inventors:

- Minneapolis MN, US
Scott W. Indermuehle - Danville CA, US
James P. Spallas - San Ramon CA, US
Ying Wu - Sunnyvale CA, US
Dimitri Klyachko - Campbell CA, US

International Classification:

H01J 37/05
G01T 1/36
H01J 37/28

Abstract:

A scanning electron microscopy (SEM) and energy dispersive spectroscopy (EDS) apparatus that includes a scanning electron microscope, an x-ray detector, and an auxiliary acceleration voltage source. The scanning electron microscope includes a sample holder, and a layered electron beam column arranged to output an electron beam towards the sample holder at an initial beam energy. The auxiliary acceleration voltage source is to apply an auxiliary acceleration voltage between the sample holder and the layered electron beam column to accelerate the electron beam to a final beam energy. At the final beam energy, the electron beam is capable of generating x-rays at multiple wavelengths from a larger range of atomic species than the electron beam at the initial beam energy.