Scott A Cann

US Patent:

7059943, Jun 13, 2006

Filed:

Jun 28, 2001

Appl. No.:

09/893928

Inventors:

Scott Cann - Washougal WA, US
Michael Huston - Vancouver WA, US
Sergey N. Altukhov - Vancouver WA, US

Assignee:

SEH America, Inc. - Vancouver WA

International Classification:

B24B 1/00

US Classification:

451 44, 451 54, 451287

Abstract:

A slurry recycling apparatus having a first filter, a dirty side storage tank, slurry pump, second filter, clean side storage tank and slurry outlet, in which used slurry from an edge notch polishing apparatus is delivered to the first screen filter, transported to the dirty side slurry storage tank, pumped from the dirty side slurry storage tank through a second filter that filters out small particulate matter from the slurry and allows the slurry to pass to the clean side slurry storage tank, and finally to the edge notch polishing apparatus as needed. Slurry which is not immediately taken from the clean side slurry storage tank is continuously recycled through the second filter by overflowing from the clean side to the dirty side slurry storage tank where it is there pumped through the second filter back into the clean side slurry storage tank.

US Patent:

58416617, Nov 24, 1998

Filed:

Aug 26, 1996

Appl. No.:

8/703028

Inventors:

Curtis Paul Buchanan - Camas WA
Thomas Read Paine - Vancouver WA
Scott Alan Cann - Washougal WA

Assignee:

Seh America, Inc. - Vancouver WA

International Classification:

G06F 1900
G06G 764
G06G 766

US Classification:

36446828

Abstract:

In a semiconductor manufacturing process in which wafers are analyzed using a wafer image (ADS) vision system and automated dimensioning equipment (ADE), an automated communication interface system is provided. The interface system uses a programmable logic controller in combination with relays to communicate signals between the ADS vision system and the automated dimensioning equipment in response to signal indications in both. The programmable logic controller includes a plurality of timers for generating signals of selected duration as well as time delays of selected duration. The relays permit signals to be communicated in the face of signal system incompatibility between components. When a wafer in the automated dimensioning equipment is ready for optical analysis, the interface system responds by sending a start signal to the ADS vision system, which responds by analyzing the wafer and providing accept or reject indications. Signals representing the accept or reject indications are communicated to the automated dimensioning equipment, followed by an enter signal which is required by such equipment.