Chester C. Thompson - Roslyn Heights NY Raymond J. Loby - Plainview NY
Assignee:
Radiation Dynamics, Inc. - Melville NY
International Classification:
H01J 3302
US Classification:
2504923
Abstract:
Provided herein is an electro-magnetic field former for controlling charged particle trajectories in a scanning charge particle source including a pair of induction coils and C-shaped ferromagnetic yokes which are positioned in the air space between the particle source and a target at the target edges to normalize the angle of incidence of the particles relatve to the target and to deflect scattered particles into the target edges. Also provided is a field former controller to compensate for induced flux variations caused by an oscillating particle beam.
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