Paul C. Buschner - Colchester VT Timothy G. Dunham - So. Burlington VT Howard S. Landis - Underhill VT
Assignee:
International Business Machines Corporation - Armonk NY
International Classification:
H01L 21302
US Classification:
438689, 438690, 438704, 438706, 438745
Abstract:
A method for determining the AB etch endpoint during an silicon trench isolation fabrication process requires the introduction into the STI design a sufficient quantity of âdummyâ diffusion structures that provide a strong endpoint signal during normal STI fabrication and, that which endpoint signal may be controlled by adjustment of the planarization shapes associated with the dummy diffusion structures.
Self-Aligned Trench Capacitor Capping Process For High Density Dram Cells
MASAMI AOKI - FISHKILL NY, US HIROFUMI INOUE - FISHKILL NY, US BRUCE W. PORTH - JERICHO VT, US MAX G. LEVY - ESSEX JUNCTION VT, US VICTOR NASTASI - HOPEWELL JUNCTION NY, US EMILY E. FISCH - BURLINGTON VT, US PAUL C. BUSCHNER - COLCHESTER VT, US
International Classification:
H01L021/8234 H01L021/8244 H01L021/8242
US Classification:
438/244000
Abstract:
A process for eliminating roughness on a silicon nitride trench liner is disclosed. A capping film on the top of the trench is formed in a self-aligned manner. This capping film prevents short circuits between a storage node and a passing word-line.
A-Maize-ing Kettle Korn since Jun 2002
Owner A-Maize-ing Kettle Korn
IBM Jun 1981 - Aug 2001
Labratory Specialist
Education:
Holyoke High School
Holyoke Community College
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