Takeshi Kamei - Theodore AL, US Laura Prine - Theodore AL, US Takamasa Yasukawa - Yokkaichi-shi, JP Yasuhiro Oda - Yokkaichi-shi, JP
Assignee:
MITSUBISHI MATERIALS CORPORATION - Tokyo Mitsubishi Polycrystalline Silicon America Corporation (MIPSA) - Theodore AL
International Classification:
C01B 33/107
US Classification:
423342
Abstract:
The present invention relates to a method for producing trichlorosilane having a reduced amount of boron compounds. The method including: (A) reacting metallurgical grade silicon with hydrogen chloride in a fluidized-bed reactor to produce a reaction gas including trichlorosilane; (B) first distilling the reaction gas, for separating first vapor fractions and first residue fractions, by setting a distillation temperature at a top of a distillation column between about a boiling point of trichlorosilane and about a boiling point of tetrachlorosilane and feeding the first vapor fractions to a second distillation column; (C) second distilling, for separating the trichlorosilane and second vapor fractions including boron compounds, by setting a distillation temperature at a top of the distillation column between about a boiling point of dichlorosilane and about a boiling point of trichlorosilane; and (D) feeding back the second vapor fractions to the fluidized-bed reactor.
Apparatus And Method For Producing Polycrystalline Silicon Having A Reduced Amount Of Boron Compounds By Forming Phosphorus-Boron Compounds
Laura Prine - Theodore AL, US Richard M. Halstead - Spanish Fort AL, US Michael W. Keevan - Theodore AL, US
Assignee:
Mitsubishi Materials Corporation - Tokyo Mitsubishi Polycrystalline Silicon America Corporation (MIPSA) - Theodore AL
International Classification:
C01B 33/039 B01J 8/18
US Classification:
423349, 422139
Abstract:
The invention concerns an apparatus and a method for manufacturing polycrystalline silicon having a reduced amount of boron compounds. The invention provides an apparatus and a method which mix an unpurified trichlorosilane with purified hydrogen gas from an activated carbon tower. The mixture is sent to a distillation apparatus for purifying trichlorosilane.