Roman Gutierrez - La Crescenta CA Tony K. Tang - Glendale CA Kirill Shcheglov - Los Angeles CA
Assignee:
California Institute of Technology - Pasadena CA
International Classification:
G01C 1900
US Classification:
267136, 188378, 7351432
Abstract:
A micromachined resonator mountable to an external support structure has a proof mass coupled to a base structure by a first spring structure, the base structure having a plurality of electrodes, and a second spring structure coupling the base structure to the external support structure.
Youngsam Bae - Gardena CA Ken J. Hayworth - Northridge CA Kirill V. Shcheglov - Los Angeles CA
Assignee:
California Institute of Technology - Pasadena CA
International Classification:
G01P 904
US Classification:
7350412, 438 50
Abstract:
A split-resonator integrated-post vibratory microgyroscope may be fabricated using micro electrical mechanical systems (MEMS) fabrication techniques. The microgyroscope may include two gyroscope sections bonded together, each gyroscope section including resonator petals, electrodes, and an integrated half post. The half posts are aligned and bonded to act as a single post.
Electrostatic Spring Softening In Redundant Degree Of Freedom Resonators
Ken J. Hayworth - Northridge CA Kirill V. Shcheglov - Los Angeles CA Todd E. Humphreys - Ogden UT A. Dorian Challoner - Manhattan Beach CA
Assignee:
California Institute of Technology - Pasadena CA The Boeing Company - Chicago IL
International Classification:
G01P 904
US Classification:
7350412
Abstract:
The present invention discloses an isolated electrostatic biased resonator gyroscope. The gyroscope includes an isolated resonator having a first and a second differential vibration mode, a baseplate supporting the isolated resonator, a plurality of excitation affixed to the baseplate for exciting the first differential vibration mode, a plurality of sensing electrodes affixed to the baseplate for sensing movement of the gyroscope through the second differential vibration mode and a plurality of bias electrodes affixed to the baseplate for trimming isolation of the resonator and substantially minimizing frequency split between the first and second differential vibration modes. Typically, the isolated resonator comprises a proof mass and a counterbalancing plate with the bias electrodes disposed on the baseplate below.
Method Of Producing An Integral Resonator Sensor And Case
Kirill V. Shcheglov - Los Angeles CA, US A. Dorian Challoner - Manhattan Beach CA, US Ken J. Hayworth - Pasadena CA, US Dean V. Wiberg - LaCrescenta CA, US Karl Y. Yee - Pasadena CA, US
Assignee:
The Boeing Company - Chicago IL California Institute of Technology - Pasadena CA
The present invention discloses an inertial sensor having an integral resonator. A typical sensor comprises a planar mechanical resonator for sensing motion of the inertial sensor and a case for housing the resonator. The resonator and a wall of the case are defined through an etching process. A typical method of producing the resonator includes etching a baseplate, bonding a wafer to the etched baseplate, through etching the wafer to form a planar mechanical resonator and the wall of the case and bonding an end cap wafer to the wall to complete the case.
Isolated Resonator Gyroscope With Compact Flexures
A. Dorian Challoner - Manhattan Beach CA, US Kirill V. Shcheglov - Los Angeles CA, US
Assignee:
The Boeing Company - Chicago IL California Institute of Technology - Pasadena CA
International Classification:
G01C019/00
US Classification:
7350416
Abstract:
The present invention discloses a gyroscope comprising an isolated resonator including a post proof mass and counterbalancing plate. One or more double beam flexures each interconnect the counterbalancing plate and the proof mass with a first and a second beam attached to the post proof mass and a third and a fourth beam attached to the counterbalancing plate. A baseplate is affixed to the resonator by the double beam flexures. The counterbalancing plate and the proof mass transfer substantially no net momentum to the baseplate when the resonator is excited.
Isolated Resonator Gyroscope With Isolation Trimming Using A Secondary Element
A. Dorian Challoner - Manhattan Beach CA, US Kirill V. Shcheglov - Los Angeles CA, US
Assignee:
The Boeing Company - Chicago IL California Institute of Technology - Pasadena CA
International Classification:
G01N 9/04
US Classification:
7350412, 7350414
Abstract:
The present invention discloses a resonator gyroscope including an isolated resonator. One or more flexures support the isolated resonator and a baseplate is affixed to the resonator by the flexures. Drive and sense elements are affixed to the baseplate and used to excite the resonator and sense movement of the gyroscope. In addition, at least one secondary element (e. g. , another electrode) is affixed to the baseplate and used for trimming isolation of the resonator. The resonator operates such that it transfers substantially no net momentum to the baseplate when the resonator is excited. Typically, the isolated resonator comprises a proof mass and a counterbalancing plate.
Isolated Resonator Gyroscope With A Drive And Sense Plate
A. Dorian Challoner - Manhattan Beach CA, US Kirill V. Shcheglov - Los Angeles CA, US
Assignee:
The Boeing Company - Chicago IL California Institute of Technology - Pasadena CA
International Classification:
G01C 19/00
US Classification:
7350402
Abstract:
The present invention discloses a resonator gyroscope comprising a vibrationally isolated resonator including a proof mass, a counterbalancing plate having an extensive planar region, and one or more flexures interconnecting the proof mass and counterbalancing plate. A baseplate is affixed to the resonator by the one or more flexures and sense and drive electrodes are affixed to the baseplate proximate to the extensive planar region of the counterbalancing plate for exciting the resonator and sensing movement of the gyroscope. The isolated resonator transfers substantially no net momentum to the baseplate when the resonator is excited.
Isolated Planar Gyroscope With Internal Radial Sensing And Actuation
Kirill V. Shcheglov - Los Angeles CA, US A. Dorian Challoner - Manhattan Beach CA, US
Assignee:
The Boeing Company - Chicago IL California Institute of Technology - Pasadena CA
International Classification:
G01P 9/04
US Classification:
7350413
Abstract:
The present invention discloses an inertial sensor comprising a planar mechanical resonator with embedded sensing and actuation for substantially in-plane vibration and having a central rigid support for the resonator. At least one excitation or torquer electrode is disposed within an interior of the resonator to excite in-plane vibration of the resonator and at least one sensing or pickoff electrode is disposed within the interior of the resonator for sensing the motion of the excited resonator. In one embodiment, the planar resonator includes a plurality of slots in an annular pattern; in another embodiment, the planar mechanical resonator comprises four masses; each embodiment having a simple degenerate pair of in-plane vibration modes.
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