Chun-Teh Kao

US Patent:

20070121192, May 31, 2007

Filed:

Nov 30, 2005

Appl. No.:

11/292329

Inventors:

Chii Lee - Fremont CA, US
Chun-Teh Kao - Cupertino CA, US
Hung Hu - Saratoga CA, US

International Classification:

G02B 26/00

US Classification:

359291000

Abstract:

A spatial light modulator includes a mirror plate comprising a reflective upper surface, a lower surface having a conductive surface portion, and a substrate portion having a first cavity having an opening on the lower surface, a second cavity in the substrate portion, and a membrane over the second cavity. The modulator includes a substrate comprising an upper surface, a hinge support post in connection with the upper surface, a hinge component supported by the hinge support post and in connection with the mirror plate to facilitate a rotation of the mirror plate, and an upright landing tip in connection with the upper surface of the substrate. The hinge component is extends into the first cavity. The upright landing tip is configured to contact the membrane over the second cavity in the substrate portion of the mirror plate to stop the rotation of the mirror plate at a predetermined orientation.

US Patent:

20200087784, Mar 19, 2020

Filed:

Nov 25, 2019

Appl. No.:

16/693631

Inventors:

- Santa Clara CA, US
PAUL MA - Santa Clara CA, US
GUODAN WEI - San Jose CA, US
CHUN-TEH KAO - Cupertino CA, US

International Classification:

C23C 16/455
C23C 16/44

Abstract:

A chamber lid assembly includes: a central channel having an upper portion and a lower portion and extending along a central axis; a housing at least partially defining a first and a second annular channel, each fluidly coupled to the central channel; a first plurality of apertures disposed along a horizontal plane through the housing to provide a multi-aperture inlet between the first annular channel and the central channel; a second plurality of apertures disposed along a horizontal plane through the housing to provide a multi-aperture inlet between the second annular channel and the central channel, wherein the first and the second plurality of apertures are angled differently with respect to the central axis so as to induce opposing rotational flow of gases about the central axis; and a tapered bottom surface extending from the lower portion of the central channel to a peripheral portion of the chamber lid assembly.

US Patent:

20150376784, Dec 31, 2015

Filed:

Jun 26, 2015

Appl. No.:

14/752275

Inventors:

- Santa Clara CA, US
Paul MA - Santa Clara CA, US
Guodan WEI - San Jose CA, US
Chun-Teh KAO - Cupertino CA, US

International Classification:

C23C 16/455

Abstract:

A chamber lid assembly includes: a central channel having an upper portion and a lower portion and extending along a central axis; a housing at least partially defining a first and a second annular channel, each fluidly coupled to the central channel; a first plurality of apertures disposed along a horizontal plane through the housing to provide a multi-aperture inlet between the first annular channel and the central channel; a second plurality of apertures disposed along a horizontal plane through the housing to provide a multi-aperture inlet between the second annular channel and the central channel, wherein the first and the second plurality of apertures are angled differently with respect to the central axis so as to induce opposing rotational flow of gases about the central axis; and a tapered bottom surface extending from the lower portion of the central channel to a peripheral portion of the chamber lid assembly.